Fluidic control valve with small displacement actuators

ABSTRACT

A fluidic control valve configured to control a flow of fluid through a conduit includes a piezostack actuator, a seal plate having a sealing face, an orifice plate including a plurality of orifices, and a suspension connected to the seal plate. The piezostack actuator is configured to displace the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the orifice plate to open the valve. The suspension is configured to flex and adjust an orientation of the sealing face relative to the orifice plate during movement of the seal plate from the open position to the closed position.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is a continuation-in-part of and claims priority to U.S. patent application Ser. No. 15/399,150, filed Jan. 5, 2017, which is based on and claims the benefit of U.S. provisional patent application Ser. No. 62/287,655, filed Jan. 27, 2016, the contents of which are hereby incorporated by reference in their entirety.

GOVERNMENT FUNDING

This invention was made with government support under EEC-0540834 awarded by the National Science Foundation. The government has certain rights in the invention.

BACKGROUND

Embodiments of the present disclosure are directed to a fluidic control valve and, more specifically, to a valve which utilizes actuators having small displacements without the need for displacement amplification mechanisms. Some embodiments include components having both macro-scale and micro-scale features, such as features that are formed using micro-electromechanical systems (MEMS) device fabrication techniques. Fluidic control valves in accordance with other embodiments are also disclosed.

A microvalve is a miniature valve that controls the flow and/or pressure of a fluid passing through it. Inside the microvalve, the fluid flows through channels or orifices that are sized to a micrometer scale. Microvalves developed so far can be classified into two types: active and passive. Active microvalves utilize a powered actuator to control the opening and closure of the micro orifice or channel through which the fluid flows. Passive microvalves, on the other hand, have no actuator to control the fluid flow and are simply check valves operated by the pressure of the flowing fluid and its direction of flow. Passive microvalves are often used as part of micropumps. In contrast, active microvalves are usually free standing fluidic control devices.

The majority of active microvalves are used in pneumatic systems. Many of these valves are used in systems that require precision control of gas flow for biomedical and manufacturing processes. More recently, pneumatic active microvalves are seeing potential application in microspacecraft propulsion systems, where weight, volume and power savings are vital. Another promising application of pneumatic active microvalves is in human assist devices, where power consumption and weight should be minimized. A number of studies have also been conducted on microvalves for liquid applications. Most of these serve as check valves in micropumps or as valves in lab-on-a-chip and chemical analysis systems. However, despite continuous development for the past three decades, microvalves have seen limited commercial success due to difficulties in design such as pressure handling capacity, sealing and packaging.

Pneumatic valves utilizing piezoelectric actuators have recently entered the commercial market. Two variants on piezoelectric actuators are most commonly used: “piezostack” actuators and “piezobender” actuators. Piezostack actuators are composed of a stack of many layers of a piezoelectric material. They rely on the change in thickness of a piezoelectric material when a voltage is applied to produce a deflection. They produce relatively large forces but very small deflections. While variants of piezobender actuators exist, the most common is the “cantilevered piezobender”. It consists of a cantilever beam which includes a piezoelectric layer applied to either the top or bottom of a passive layer. When the piezoelectric layer is actuated, the strain induced in the layer causes the beam to deflect as a cantilever beam in pure bending. (An alternative architecture consists of using a piezoelectric layer on both the top and bottom surfaces of the beam. One layer is activated to place it in tension, while the opposite layer is activated so as to place it in compression, causing a larger deflection of the beam.) Piezobenders produce larger deflections but very small forces relative to piezostacks.

Current pneumatic valves exploit the benefits of these piezoelectric actuators. The ViVa actuator produced by Viking AT utilizes a piezostack actuator. This actuator requires the inclusion of a mechanical motion amplifier to increase the very small motion of the piezostack into a motion large enough to be useful with a single orifice.

Another pneumatic valve is the “VEMR” or “VEMC” series by Festo, which utilize cantilevered piezobenders rather than piezo stacks to achieve an actuator motion large enough to work with a single orifice. The use of piezobenders generally prevents the use of the valve as a proportional valve at high differential pressures (e.g., above 4 bar).

SUMMARY

Embodiments of the present disclosure are directed to a fluidic control valve and, more specifically, to a valve which utilizes one or more actuators having small displacements, such as one or more piezostack actuators, without the need for displacement amplification mechanisms. Some embodiments include components having both macro-scale and micro-scale features, such as features that are formed using micro-electromechanical systems (MEMS) device fabrication techniques.

In some embodiments, the fluidic control valve is configured to control a flow of fluid through a conduit and includes a piezostack actuactor, a seal plate having a sealing face, an orifice plate including a plurality of orifices, and a suspension connected to the seal plate. The piezostack actuator is configured to displace the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the orifice plate to open the valve. The suspension is configured to flex and adjust an orientation of the sealing face relative to the orifice plate during movement of the seal plate from the open position to the closed position.

Some embodiments of the fluidic control valve include a piezostack actuator, a seal plate having a sealing face, a seal plate carrier, an orifice plate and a suspension. The seal plate carrier is positioned between the piezostack actuator and the seal plate, and is configured to drive the seal plate along the longitudinal axis in response to expansion and contraction of the piezostack actuator. The orifice plate includes first and second opposing surfaces, through which at least twenty orifices extend, each orifice having a diameter of about 10 microns to about 500 microns. The suspension includes a peripheral support and a plurality of flexure arms connecting the seal plate to the peripheral support. The piezostack actuator is configured to displace the seal plate carrier and the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the first surface of the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the first surface of the orifice plate to open the valve. The suspension is configured to flex and adjust an orientation of the sealing face relative to the first surface of the orifice plate during movement of the seal plate from the open position to the closed position.

This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter. The claimed subject matter is not limited to implementations that solve any or all disadvantages noted in the Background.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 and 2 are simplified diagrams of a valve formed in accordance with embodiments of the present disclosure in closed and open states, respectively.

FIGS. 3-5 respectively show an isometric view of a valve within conduit with a portion of the conduit removed, an isometric exploded view of a valve, and an isometric cross-sectional view of a valve within conduit, in accordance with embodiments of the present disclosure.

FIGS. 6A and 6B respectively show an isometric view of a seal plate in accordance with embodiments of the present disclosure, and a magnified isometric view of a portion of an orifice plate in accordance with embodiments of the present disclosure.

FIGS. 6C and 6D are an isometric view of an exemplary orifice plate, and an isometric cross-sectional view of a seal plate and the orifice plate of FIG. 6C taken generally along a plane that is perpendicular to a longitudinal axis, in accordance with embodiments of the present disclosure.

FIGS. 7A and 7B are isometric cross-sectional and side cross-sectional views of an orifice plate having exemplary contoured orifices, in accordance with embodiments of the present disclosure.

FIG. 8 is an isometric cross-sectional view of an exemplary valve, in accordance with embodiments of the present disclosure.

FIG. 9 is a side cross-sectional view of a valve in accordance with embodiments of the present disclosure.

FIGS. 10-13 illustrate simplified diagrams of a multi-piezostack actuator valve in accordance with embodiments of the present disclosure in various states of operation.

FIG. 14 is an isometric view of an exemplary multi-piezostack actuator valve within a flow conduit in accordance with embodiments of the present disclosure.

FIG. 15 is a simplified view of a portion of an orifice plate in accordance with embodiments of the present disclosure.

FIG. 16 is a simplified side cross-sectional view of a portion of a valve illustrating an exaggerated example of a seal plate failing to seal orifices of an orifice plate when in a closed position.

FIGS. 17A-C respectively are simplified side cross-sectional views of a portion of an exemplary valve having a suspension with a seal plate in an open position, an intermediary position, and a closed position, in accordance with embodiments of the present disclosure.

FIG. 18 is a simplified isometric view of a valve, in accordance with embodiments of the present disclosure.

FIG. 19 is a simplified cross-sectional view of the valve shown in FIG. 18 taken generally along line 19-19.

FIGS. 20 and 21 respectively are simplified isometric and top views of a suspension assembly of a valve, in accordance with embodiments of the present disclosure.

FIG. 22 is a simplified isometric cross-sectional view of the suspension assembly taken generally along line 22-22 of FIG. 21.

FIG. 23 is a simplified side cross-sectional view of a portion of the suspension assembly, in accordance with embodiments of the present disclosure.

FIG. 24 is an isometric view of an exemplary seal plate carrier supporting a seal plate, in accordance with embodiments of the present disclosure.

FIG. 25 is an isometric cross-sectional view of a valve including the seal plate carrier of FIG. 24, in accordance with embodiments of the present disclosure.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

Embodiments of the present disclosure are described more fully hereinafter with reference to the accompanying drawings. Elements that are identified using the same or similar reference characters refer to the same or similar elements. The various embodiments of the invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

Specific details are given in the following description to provide a thorough understanding of the embodiments. However, it is understood by those of ordinary skill in the art that the embodiments may be practiced without these specific details. For example, circuits, systems, networks, processes, frames, supports, connectors, motors, processors, and other components may not be shown, or shown in block diagram form in order to not obscure the embodiments in unnecessary detail.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It will be understood that when an element is referred to as being “connected” or “coupled” to another element, it can be directly connected or coupled to the other element, or intervening elements may be present. In contrast, if an element is referred to as being “directly connected” or “directly coupled” to another element, there are no intervening elements present.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a first element could be termed a second element without departing from the teachings of the present invention.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

As will further be appreciated by one of skill in the art, embodiments of the present invention may be embodied as methods, systems, devices, and/or computer program products, for example. The computer program or software aspect of the present invention may comprise computer readable instructions or code stored in a computer readable medium or memory. Execution of the program instructions by one or more processors (e.g., central processing unit) results in the one or more processors performing one or more functions or method steps described herein. Any suitable patent subject matter eligible computer readable media or memory may be utilized including, for example, hard disks, CD-ROMs, optical storage devices, or magnetic storage devices. Such computer readable media or memory do not include transitory waves or signals.

The computer-usable or computer-readable medium or memory may be, for example but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, device, or propagation medium. More specific examples (a non-exhaustive list) of the computer-readable medium would include the following: an electrical connection having one or more wires, a portable computer diskette, a random axis memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber, and a portable compact disc read-only memory (CD-ROM). Note that the computer-usable or computer-readable medium could even be paper or another suitable medium upon which the program is printed, as the program can be electronically captured, via, for instance, optical scanning of the paper or other medium, then compiled, interpreted, or otherwise processed in a suitable manner, if necessary, and then stored in a computer memory.

Embodiments of the invention generally relate to a fluidic control valve or valve. Some embodiments of the valve are configured to provide proportional flow control. Embodiments of the valve may be used for pneumatic or hydraulic applications.

FIGS. 1 and 2 are simplified diagrams of a valve 100 formed in accordance with embodiments of the present disclosure in closed and open states, respectively. In some embodiments, the valve 100 includes or is mounted within a housing or conduit 102 that defines a fluid flow path, such as using a suitable bracket 103. When the valve 100 is in the closed state (FIG. 1), fluid flow through the conduit 102 is prevented, and when the valve 100 is in the open state, a flow of fluid is allowed to travel through the conduit 102, as indicated by the arrows in FIG. 2.

In some embodiments, the valve 100 comprises a piezostack or piezostack actuator 104, a seal plate 106, and an orifice plate 108. In some embodiments the valve 100 includes a controller 110 and a voltage supply 112. In some embodiments, the controller 110 represents one or more microprocessors and other circuit elements that are configured to control the voltage source 112 in response to the execution of program instructions, or an input, and facilitate the performance of one or more functions described herein. The program instructions may be stored in memory that is accessible by the one or more processors of the controller 110, such as local memory of the controller 110 or remote memory that is accessible through a network, for example.

The piezostack 104 is configured to expand and contract along a longitudinal axis 114 in response to the voltage supplied by the voltage source 112. When in an expanded state (FIG. 1), an end 115 of the piezostack 104 presses the seal plate 106 against the orifice plate 108. This seals the plurality of orifices 116 of the orifice plate 108 and places the valve 100 in the closed position, as shown in FIG. 1. When the piezostack 104 is in a contracted state, the seal plate 106 is displaced from the orifice plate 108 and fluid can flow through the plurality of orifices 116 of the orifice plate 108 and through the conduit 102, as shown in FIG. 2. In some embodiments, the piezostack 104 may be placed in states between the contracted and expanded states to allow for proportional control of the flow of fluid through the conduit 102.

The piezostack 104 requires low actuation power. The piezostack 104 is a capacitive device that requires near zero power to hold it in a specified position, regardless of whether that position is fully closed (FIG. 1), fully open (FIG. 2), or anywhere in between. This provides advantages over conventional valves that utilize a magnetic actuator, as such actuators consume power constantly while being held at any position other than their default zero position. Therefore, the valve 100 utilizing the piezostack 104 saves substantial amounts of electric actuation energy compared to conventional magnetically actuated valves. Additionally, the operating temperature of the piezostack 104 does not noticeably increase when held at a constant position.

Exemplary piezostack actuators that may be suitable for uses as the piezostack 104 include those manufactured by Thorlabs Inc. (www.thorlabs.com), such as Item #PK2JUP1, Item #PK2FVP1, Item #PK2FVP2, Item #PK4GA3H5P2, Part #AE0505D16F, and Part #PZS001, or those manufactured by Piezo Systems, Inc. (www.piezo.com), such as Part #TS18-H5-202.

In some embodiments, the orifice plate 108 includes a plurality of orifices 116 that extend through the orifice plate 108. In some embodiments, the orifices 116 are substantially cylindrical and extend substantially parallel to the longitudinal axis 114 when the orifice plate 108 is oriented perpendicularly to the longitudinal axis 114, as shown in FIG. 1. Embodiments of the orifices 116 include orifices having a circular cross-sectional shape, a rectangular cross-sectional shape, or other shape.

FIGS. 3-5 respectively show an isometric view of an exemplary valve 100 formed in accordance with embodiments of the present disclosure within the conduit 102 with a portion of the conduit 102 removed, an isometric exploded view of elements of the valve 100, and an isometric cross-sectional view of the valve 100 within the conduit 102.

In some embodiments, the valve 100 includes a seal plate carrier 118 that is positioned between the piezostack 104 and the seal plate 106. Expansion and contraction of the piezostack 104 along the longitudinal axis 114 drives the seal plate carrier 118 and the attached seal plate 106 along the longitudinal axis 114 either toward or away from the orifice plate 108. In some embodiments, the seal plate 106 includes a central opening 120 and the seal plate carrier 118 includes one or more passages 122. The passages 122 allow for fluid to flow through the central opening 120 when the valve 100 is in an open position (i.e., not closed), as indicated in FIG. 2. In some embodiments, a radial gap 124 extends between the seal plate 106 and the conduit 102, through which fluid can flow when the valve 100 is in an open position, as indicated in FIG. 2. In some embodiments, the direction of fluid flow is the reverse of that shown in FIG. 2.

In some embodiments, the piezostack actuator 104 includes a center hole 125 through which fluid may flow to the central opening 120 of the seal plate 106, as indicated in phantom lines in FIG. 3. One suitable piezostack 104 that includes a center hole is the Thorlabs PK4GA3H5P2 piezostack.

In some embodiments, the valve 100 does not utilize a mechanical motion amplifier to increase the very small motion of the piezostack 104 along the longitudinal axis 114. In some embodiments, the displacement of the seal plate 106 along the axis 114 relative to the orifice plate 108 has a 1:1 ratio to the movement of the piezostack 104 along the longitudinal axis 114. That is, movement of the piezostack 104 is directly translated to movement of the seal plate 106 along the axis 114. Thus, each micron of movement of the end 115 of the piezostack 104 causes a micron of movement of the seal plate 106.

In some embodiments, the orifice plate 108 includes an array of micro-scale orifices 116 rather than a single, large orifice, as in conventional valves. The diameter of each of the orifices 116 is sized to be approximately four times the maximum displacement of the end 115 of piezostack 104 along the longitudinal axis 114. For example, if the piezostack 104 is capable of a 15 micron deflection, then the orifices 116 are sized to have a diameter of approximately 40-60 microns each. The basis of this is that the flow area around the periphery of the orifice 116 times the displacement of the end 115 of piezostack 104 will match the area of the orifice when the end 115 of the piezostack 104 is displaced 25% of the diameter of the orifices 116 from the plate 108. The number of orifices 116 is selected to produce a summed area equal to the desired area of a single, equivalent orifice. For example, the flow capacity of a single orifice having a diameter of 1.25 mm would be approximately equaled by an array of 630 orifices each having a diameter of 50 microns.

In some embodiments, the orifices 116 have a diameter of about 10 microns to about 500 microns, including more specific ranges of 10 microns to 50 microns, less than 50 microns, less than 100 microns, less than 150 microns, less than 200 microns, less than 250 microns, less than 300 microns, less than 350 microns, less than 400 microns, less than 450 microns, and less than 500 microns. In some embodiments, the orifices 116 are fabricated using a micro-machining process.

In some embodiments, the orifice plate 108 includes 20 or more orifices 116, such as 20-5,000 orifices 116. In more specific embodiments, the orifice plate 108 includes more than 30 orifices 116, more than 50 orifices 116, and more than 100 orifices 116.

In some embodiments, a circular opening having an area that is equivalent to the total area of the orifices 116 has a diameter that is larger than four times the displacement of the end 115 of piezostack 104 along the longitudinal axis 114 or the distance the piezostack 104 displaces the seal plate 106 from the orifice plate 108, when in the open position, such as a full open position (e.g., maximum displacement).

In some embodiments, the number of orifices 116 is selected to be equal to or exceed the area of a single, equivalent circular orifice divided by the product of the perimeter of each orifice 116 times the maximum displacement of the piezostack 104. For example, the flow capacity of a single orifice having a diameter of 1.25 mm would be approximately equaled by an array of 130 orifices 116 each having a diameter of 200 microns if the maximum displacement of piezostack 104 is 15 microns. In some embodiments, the diameter of the orifices 116 in orifice plate 108 may be large enough so that they can be machined using conventional machining processes rather than micro-machining.

In some embodiments, the orifice plate 108 is thin. In some embodiments, the orifice plate 108 has a thickness, through which the orifices 116 extend, that is less than approximately 300 microns, such as about 50 to about 250 microns. Other thicknesses for the orifice plate 108 may also be used, such as greater than 500 microns, and greater than 1 mm, for example. For relatively thick versions of the orifice plate 108 (e.g., thickness of greater than 500 microns), the support plate described below may be unnecessary.

In some embodiments, the valve 100 includes a support plate 128 that supports the orifice plate 108, as shown in FIGS. 1-5. The orifice plate 108 and the support plate 128 may be formed of any suitable material, such as stainless steel or aluminum, for example. In some embodiments, the orifice plate 108 and/or the support plate 128 are formed of silicon. This allows the plates 108 and 128 to be micro-machined using processes that are well established for fabricating MEMS devices. Silicon also adapts well to eutectic bonding, which can be used to bond the orifice plate 108 to the support plate 128. In some embodiments, other bonding methods may be used.

The support plate 128 generally overcomes two challenges. The first challenge stems from the fact that the depth to which an approximately 50 micron hole can be etched is limited. This first challenge is surmounted by reducing the thickness of the orifice plate 108 containing the small orifices 116. The second challenge is making the orifice plate 108 containing the array of the orifices 116 strong enough to withstand the operating pressure applied across it. As mentioned above, the plates 108 and 128 may each be formed of silicon and can be micro-machined using established MEMS fabrication techniques. However, silicon is a brittle material. In addition, the tiny orifices 116 act as stress concentrators, further lowering the strength of the orifice plate 108. The second challenge is surmounted by mounting the orifice plate 108 on the thicker support plate 128 containing the orifices 130 having 2-5 times the diameter of the holes 116 in the orifice plate 108. It then becomes feasible to etch the larger diameter holes 130 through the thicker plate 128, and the larger holes 130 induce lower levels of stress concentration. Therefore, the combination of the orifice plate 108 with the support plate 128 can be designed to withstand the total intended operating pressure differential.

The support plate 128 may be formed out of any suitable material such as steel, aluminum, or engineering plastic. The support plate 128 operates to prevent deflection of the orifice plate 108 through direct contact with the orifice plate 108 in response to a pressure difference on opposing sides of the orifice plate 108, which creates a force on the orifice plate 108. In some cases, without the support plate 128, deflection of the orifice plate 108 could be substantial in relation to the deflection of the piezostack actuator 104 used to control the movement of the seal plate 106. In the case that the deflection is substantial, the piezostack actuator 104 may not be able to move the seal plate 106 into contact with portions of the orifice plate 108, and the valve 100 would be unable to close. Thus, the support plate 128 prevents deflection and fracture of the very thin orifice plate 108, and allows the valve 100 to fully close even under significant pressure drops across the orifice plate 108.

In some embodiments, the support plate 128 is positioned on a downstream side of the orifice plate 108 relative to the direction of fluid flow through the conduit 102, as illustrated in FIGS. 1-5. Alternatively, the support plate 128 may be located on the upstream side of the orifice plate 108 relative to the direction of flow through the conduit 102, and the seal plate 106 and piezostack 104 may be located on the downstream side. In this alternative embodiment, the seal plate 106 is configured to seal the orifices 130 of the support plate 128 when the valve 100 is in the closed state.

The thickness of the support plate 128 measured along the longitudinal axis 114 is generally much thicker than the orifice plate 108 to provide the necessary support for the orifice plate 108. In some embodiments, the support plate 128 has a thickness of more than 500 microns. However, other thicknesses of the support plate 128 may also be used. In some embodiments, the support plate 128 comprises multiple plates that are stacked together to the desired thickness.

In some embodiments, the support plate 128 is stiffened using any suitable conventional technique. In some embodiments, the support plate 128 includes webbing or ribs on the opposing side from the seal plate 106 to increase its stiffness.

In some embodiments, a support plate frame 156 is positioned on a downstream side of the orifice plate 108, as shown in FIG. 4. The support plate frame 156 may support or replace the support plate 128, and operates to reduce the deflection of the orifice plate 108, and the support plate 128 (if present). The frame 156 may be integrally formed with the orifice plate 108 and/or the support plate 128. Reducing the deflection of the orifice plate 108 reduces the possibility of leakage through the valve 100 at or near the closed state. Reducing the deflection also lowers the stresses in the orifice plate 108 and the optional support plate 128. In some embodiments, the support plate frame 156 includes one or more passages 158 that extend through the frame 156 substantially parallel to the longitudinal axis 114. The passages 158 allow fluid to flow downstream through orifices 116 in the orifice plate 108 and through the orifices 130 in the optional support plate 128.

In some embodiments, the support plate 128 includes at least one opening or orifice 130 that is aligned with orifices 116 of the orifice plate 108 and allows fluid flowing through the orifices 116 to pass through the support plate 128. In some embodiments, the support plate 128 includes a plurality of orifices 130, each of which is aligned with one or more of the orifices 116 of the orifice plate 108. Thus, in some embodiments, one of the orifices 130 may provide an opening through which fluid traveling through two or more of the orifices 116 may flow. In some embodiments, each of the plurality of the orifices in the support plate 128 corresponds to one of the orifices 116 of the orifice plate 108. Thus, in some embodiments, the support plate 128 includes an array of orifices 130 that directly correspond to the array of orifices 116. Accordingly, in some embodiments, the array of the orifices 130 of the support plate 128 has a pattern that matches the pattern of the array of the orifices 116 of the orifice plate 108. In some embodiments, the arrays of the orifices 116 and the orifices 130 have a circular pattern, as shown in FIG. 4. Other patterns of the arrays of the orifices 116 and 130 may also be used.

The circular pattern of the orifices 116 is desired to minimize the distance between the edge of the seal plate 106 and the innermost orifice 116. For example, if the orifices 116 are arranged in a rectangular grid pattern and are sealed with a square seal plate 106, the minimum distance from the edge of the seal plate 106 to the innermost orifice 116 will be increased significantly. Optionally, pockets can be etched into the sealing face of the seal plate 106 outside the area that covers the orifices 116, and/or pockets can be etched into the sealing face of the orifice plate 108 outside of the immediate area around orifices 116, to further increase flow capacity through the orifices 116.

Due to the larger thickness of the support plate 128, the orifices 130 generally have a larger diameter than the orifices 116 of the orifice plate 108. In some embodiments, the orifices 130 each have a substantially larger diameter than the orifices 116, such as 2 to 5 times the diameter of each of the orifices 116.

In some embodiments, the orifices 116 are etched from one side of the orifice plate 108. This generally requires a very thin orifice plate 108. In some embodiments, the valve 100 includes the support plate 128 to provide the necessary support for the thin orifice plate 108, such as discussed above and shown in FIGS. 1-5.

In some embodiments, the orifices 116 which extend through the orifice plate 108 may be fabricated by etching the orifices 116 extending substantially parallel to center axis 114 partially through the orifice plate 108 into the downstream face of the orifice plate 108, then etching the remaining depth of the orifices 116 substantially parallel to center axis 114 on the upstream face of the orifice plate 108. This fabrication technique for etching the orifices 116 eliminates stress concentrations attributable to roughness on the far end of orifices 116 if they are etched from a single side of orifice plate 108. In some embodiments, the above process may be initiated on the upstream face and completed on the downstream face. In some embodiments, the procedure for fabricating the orifices in orifice plate 108 described earlier in this paragraph may be used to fabricate the orifices in the support plate 128.

In some embodiments, the orifice plate 108 and/or support plate 128 are supported in a fixed position relative to the conduit 102, while the end 115 of the piezostack 104 may move relative to the conduit 102 along the axis 114. The plates 108 and 128 may be supported in an assembly that is mounted to the conduit 102, or supported through another suitable arrangement.

Thus, some embodiments of the valve 100 include machined or otherwise bulk fabricated (“meso-scale”) components with micro-machined (“MEMS-scale” or “micro-scale”) components. More specifically, the piezostack 104 and the seal plate 106 are fabricated using conventional manufacturing processes, while the orifice plate 108 is fabricated using MEMS micro-machining or fabrication processes. It is noted that the seal plate 106 may also be fabricated using conventional manufacturing or micro-machining processes. As mentioned above, other exemplary embodiments of the valve include macro-scale orifices 116 in the orifice plate 108, and macro-scale orifices 130 in the support plate 128.

The use of the arrays of orifices 116 and 130 makes it possible to greatly reduce the distance the seal plate 106 must be displaced along the longitudinal axis 114 from the orifice plate 108 to fully open the valve 100 while still yielding macro-scale flow rates, such as 1-500 slpm for a pressure drop of 6 to 5 bar. This is important because the piezostack 104 produces a very small deflection of the seal plate 106 along the longitudinal axis 114. Full flow through the valve 100 is achieved if the seal plate 106 is moved away from the orifice plate 108 by approximately 25% of the equivalent diameter of each orifice 116. Thus, for instance, when the orifice plate 108 includes an array of 630 orifices 116 each having a diameter of 50 microns, the piezostack 104 needs to move the seal plate 106 approximately 15 microns along the longitudinal axis 114 away from the orifice plate 108 to change the valve 100 from the fully closed position (FIG. 1) to the fully open position (FIG. 2), which can be achieved using the piezostack 104. However, if the valve 100 utilized an equivalent single orifice of 1.25 mm in diameter instead of the array of the orifices 116, an actuator would be required to deflect the sealing component 300 microns to transition the valve from a fully closed state to a fully open state. Thus, the array of orifices 116 in place of single large orifice makes it possible to implement the valve 100 using the piezostack 104, without the need for motion amplification mechanisms to increase the displacement of the piezostack 104 along the longitudinal axis 114.

Another advantage to the valve 100 is that it can be operated at very high speeds. This is made possible due to the very small deflection that is required to transition the valve 100 between the fully closed state to the fully open state. In some embodiments, the valve 100 can achieve response times in the microsecond range, such as 100 microseconds.

In some embodiments, the sealing face 132 of seal plate 106 is a substantially flat surface. In some embodiments, the sealing face 132 of the seal plate 106 includes a plurality of sealing bosses 134, as illustrated in the isometric view of the seal plate 106 provided in FIG. 6A. In some embodiments, each of the bosses 134 is configured to be aligned with one of the orifices 116 of the orifice plate 108 when the valve 100 is in the closed state (FIG. 1). In some embodiments, the sealing bosses 134 are larger than their corresponding orifices 116, such that they overlay their corresponding orifices 116. For example, in some embodiments, the diameter of each boss 134 is larger than the diameter of each orifice 116, or at least as large as the diameter of the corresponding orifice 116. For example, in some embodiments, if each orifice 116 has a diameter of 50 microns, then the bosses might be sized to 80 microns. Other diameters can be used. Pockets between the bosses increase the area for flow between the orifices 116 and the inner and outer edges of seal plate 106, thereby increasing the flow capacity of the valve, and reducing throttling losses. Other pocket geometries can be used. In some embodiments, the bosses 134 are formed through a micro-machining process. In other embodiments, the sealing face 132 may include an elastomer layer that facilitates sealing the orifices 116 when the valve 100 is in the closed position. Alternatively or additionally, the sealing face 109 (FIG. 1) of the orifice plate 108 may include an elastomer layer.

In some embodiments, the orifice plate 108 includes sealing bosses 135 that are each aligned with one of the orifices 116, as shown in FIG. 6B. In some embodiments, the sealing bosses 135 are positioned on a sealing face 109 of the orifice plate 108. In some embodiments, the diameter of each sealing boss 135 is larger than the diameter of each orifice 116. For example, in some embodiments, if each orifice 116 has a diameter of 50 microns, then the bosses might be sized to 150 microns. Pockets between the bosses increase the area for flow between the orifices 116 and the inner and outer edges of seal plate 106, thereby increasing the flow capacity of the valve and reducing throttling losses. Other pocket geometries can be used. In some embodiments, the bosses 135 are formed through a micro-machining process.

In some embodiments, the bosses 135 have a contoured profile, as illustrated in FIG. 6C, which is an isometric view of an exemplary orifice plate 108. FIG. 6D is an isometric cross-sectional view of the seal plate 106 and the orifice plate taken generally along a plane that is perpendicular to the longitudinal axis 114. The seal plate 106 is shown in a closed position, in which the sealing face 132 engages the bosses 135. The exemplary contoured bosses 135 may have a conical exterior surface 137, which may have a curved profile, such as a convex or concave profile, or a flat profile. The contoured bosses 135 operate to improve fluid flow between the seal plate 106 and the orifice plate 108 when the seal plate 106 is in the open position (FIG. 2). The bosses 134 of the seal plate 106 may also be formed to have a contoured exterior surface in a similar manner as the bosses 135.

Thus, some embodiments of the valve 100 include a seal plate 106 having bosses 134 (FIG. 6A) and/or an orifice plate 108 having bosses 135. The bosses 134 and 135 may be contoured to have a curved (e.g., concave or convex) exterior surface, such as illustrated by the curved exterior surface 137 of the bosses 135 shown in FIGS. 6C and 6D. The contoured surfaces of the orifice plate 108, the seal plate 106, or both, such as through a suitable etching process, can decrease the interaction of moving fluid with the surfaces, reduce the effects of shear stress on the working fluid, and reduce fluid flow resistance.

In some embodiments, the orifices 116 may also be contoured to improve fluid flow through the valve 100 when in the open state including reducing turbulence, reducing shear stresses on the fluid, and/or reducing the pressure drop across the orifice plate, for example. FIGS. 7A-B are isometric cross-sectional and side cross-sectional views of an orifice plate 108 having exemplary contoured orifices 116, in accordance with embodiments of the present disclosure.

Rather than being defined by substantially flat cylindrical sidewalls that are approximately parallel to the longitudinal axis 114 or another axis that is perpendicular to the orifice plate 108 (FIG. 1), the sidewalls of the contoured orifices 116 have a profile that includes portions that are curved or angled relative to the longitudinal axis 114. In some embodiments, the cross-sectional profile of each of the contoured orifices 116 taken in a plane that extends substantially parallel to the longitudinal axis 114 includes a converging nozzle 138 that tapers from the surface 139, which may be on the input or upstream side of the orifice plate 108 relative to the fluid flow, and/or a diverging nozzle 141 that tapers from the surface 143, which may be on the output or downstream side relative to the fluid flow, as illustrated in FIGS. 7A-B. The sidewalls defining the contoured orifices 116 may include a curved conical surface, such as a curved conical surface having a convex profile, as shown in FIGS. 7A-B, and/or a flat conical surface that are non-parallel to the longitudinal axis 114. The contoured orifices 116 could be formed using any suitable technique, such as double-sided etching.

In some embodiments, the valve 100 includes a sensor 136 (FIG. 1) that is configured to detect the displacement between the seal plate 106 and the orifice plate 108, to allow for precise control of the displacement of the seal plate 106 from the orifice plate 108 using the controller 110. In some embodiments, the sensor 136 comprises a capacitive sensor. In some embodiments, the capacitive sensor 136 includes, for example, an electrically conductive coating or layer on the sealing face 132 of the seal plate 106, and one or more electrodes attached to or embedded within the orifice plate 108. Other suitable forms of the sensor 136 may also be used.

In some embodiments, the piezostack 104 defaults to an elongated state when in an unpowered state (i.e., zero or nominal voltage applied), and contracts when powered (i.e., voltage applied) to decrease the length of piezostack 104 when a voltage is applied to it. In this case, the exemplary embodiments of the valve 100 illustrated in FIGS. 1-5 would assume the closed state when the piezostack 104 is unpowered, and the valve 100 would assume an open state when sufficiently powered.

In some embodiments, the piezostack 104 defaults to a contracted state when in an unpowered state (i.e., zero or nominal voltage applied), and elongates or expands when powered to increase the length of piezostack 104 when powered (i.e., voltage applied). In this case, the exemplary embodiments of the valve 100 illustrated in FIGS. 1-5 would assume an open state when the piezostack 104 is unpowered, and the valve 100 would assume a closed state when sufficiently powered.

FIG. 8 is an isometric cross-sectional view of an exemplary valve 100 that will assume the closed state when the piezostack 104 is unpowered and in a contracted state, and will assume an open state when the piezostack 104 is powered. The piezostack 104 is connected to a mount 160 having a fixed position relative to the orifice plate 108. The face 115 of the piezostack 104 extends away from the mount 160 when a voltage is applied to it. A strut mount 170 is connected to the face 115 of the piezostack 104, so it displaces longitudinally away from the orifice plate 108 when a voltage is applied to the piezostack 104. In some embodiments, a compression spring may be used to press on the strut mount 170 and maintain the piezostack 104 in compression. Struts 175 are connected to the strut mount 170 and pass through holes 165 in the mount 160. In some embodiments, the holes 165 in the mount 160 are larger than the cross-sectional area of the struts 165 so that fluid may also pass through the holes 165. In some embodiments, additional holes may be included in the mount 160 to allow additional cross-sectional areas for fluid flow. The struts 175 are connected to the seal plate 106. In some embodiments, the mount 160, the strut mount 170, the struts 175, and the seal plate 106 are positioned so that the seal plate 106 contacts the sealing face of the orifice plate 108 when no voltage is applied to the piezostack 104, sealing the plurality of the orifices 116 of the orifice plate 108 and placing the valve 100 in the closed position. Applying maximum voltage to the piezostack 104 fully displaces the seal plate 106 away from the orifice plate 108, fully opening the valve 100 for fluid flow through the orifices 116 in the orifice plate 108, which may be supported by the support plate 128, in accordance with one or more embodiments described above.

In some embodiments, the coefficient of thermal expansion of the material used for struts 175 may be chosen to minimize the effects of temperature changes on valve performance. In other words, if a change in temperature causes the piezostack to elongate by length 6, then a strut material is chosen so that the struts also elongate by length 6, thereby cancelling the effect of the change in length of the piezostack. In some embodiments, the distance between the sealing face 132 of the seal plate 106 and the sealing face 109 of the orifice plate 108 may be adjustable so that the seal plate 106 may be precisely positioned to fully close the orifices 116 in the orifice plate 108 when the piezostack 104 is unpowered.

In some embodiments, the piezostack 104 may be placed in states between the fully contracted and fully expanded states to allow for proportional control of the flow of fluid through the conduit 102 based on the voltage that is applied to the piezostack 104. Thus, embodiments of the valves described herein may be opened to varying degrees to allow for variable flow rates through the valves. Since the piezostack 104 is a capacitive device, it only consumes power when moving (if power leakage is disregarded). Thus, the piezostack 104 nominally does not consume any power when held at a fixed position based on an applied voltage.

For example, if the piezostack is contracted in the unpowered state, when a threshold voltage is applied to the piezostack 104 of the valve 100 of FIGS. 1 and 2, the seal plate 106 moves from the open position (FIG. 2) a certain distance toward the orifice plate 108, which allows for a certain flow rate of fluid through the valve 100. An increase in the voltage applied to the piezostack 104 of the valve 100 causes the seal plate 106 to move closer to the orifice plate 108, and decreases the flow rate of fluid through the valve 100. Thus, the voltage that is applied to the piezostack 104 may be adjusted to various levels to change the rate of fluid flow through the valve 100 from a zero flow rate to a maximum flow rate.

FIG. 9 is a side cross-sectional view of an exemplary valve 100, which assumes a closed position when the piezostack 104 is unpowered and is in a contracted state. Thus, the piezostack 104 elongates rather than contracts when a voltage is applied to it. In some embodiments, a compressive force is maintained on the piezostack 104, such as by a spring that biases the seal plate carrier 180 toward the piezostack 104, for example. FIG. 9 illustrates the valve 100 in a state where a voltage is applied to the piezostack 104, so the piezostack 104 is elongated and the valve 100 is in the open state. In this case, the face 115 of the piezostack 104 displaces longitudinally along the axis 114 in response to the elongation of the piezostack 104, which also displaces a shaft 150 longitudinally along the axis 114. In some embodiments, a portion of the piezostack 104 is attached to the conduit 102, such as through an appropriate bracket 103, as shown in FIG. 9. The shaft 150 is connected to the seal plate carrier 180, which is attached to the seal plate 106. Thus, movement of the shaft 150 along the axis 114 also moves the seal plate 106 along the axis 114 relative to the orifice plate 108 and the support plate 128, which are fixed relative to the conduit 102. Expansion of the piezostack 104 displaces the seal plate 106 from the orifice plate 108 to open the valve 100 and allow fluid to flow through the orifices 116 and the conduit 102, and contraction of the piezostack 104 drives the seal plate 106 against the orifice plate 108 to seal the orifices 116 and close the valve 100.

In some embodiments, the seal plate carrier 180 may include passages to allow fluid to pass through it and into the center hole 120 of the seal plate 106. If no voltage is applied to piezostack 104, the face 115 of the piezostack 104 moves to the right in FIG. 9, displacing the shaft 150 and the seal plate carrier 180 and the seal plate 106 to the right to the point where the sealing face 132 of the seal plate 106 contacts the surface of the orifice plate 108, blocking flow through the orifices 116 and closing the valve 100. In some embodiments, the orifice plate 108 and the support plate 128 each include a hole 185, through which the shaft 150 passes. A seal 152 between the support plate 128 and the shaft 150 prevents fluid flow through the hole 185. In other embodiments, the seal 152 may be included between the orifice plate 108 and the shaft 150.

Additional embodiments are directed to a valve 200 having a plurality of piezostack actuators 104 and seal plates 106. Such a valve allows for precise control of multiple flow rates through the selective actuation of the piezostack actuators 104. Exemplary embodiments of the multi-piezostack actuator valve 200 will be described with references to FIGS. 10-14. FIGS. 10-13 illustrate simplified diagrams of multi-piezostack actuator valve 200 in various states of operation. FIG. 14 is an isometric view of an exemplary multi-piezostack actuator valve 200 within a flow conduit 102, a portion of which is cut away to expose the valve 200.

In general, the valve 200 includes a plurality of the piezostack actuators 104 and other components that are generally formed in accordance with one or more embodiments described above regarding the valve 100. Each of the piezostack actuators 104 controls the movement of a corresponding seal plate 106 along the longitudinal axis 114 between closed and open positions. When the seal plates 106 are in their closed position, they seal an array of orifices 116 of an orifice plate 108, which may be supported by the support plate 128, in accordance with one or more embodiments described above with regards to the valve 100. By selectively transitioning the seal plates 106 from their closed position to their open position using the corresponding piezostack 104, the valve 200 can increment the flow rate of fluid through the conduit 102.

In the exemplary valve 200 shown in FIGS. 10-13, three piezostack actuators 104A-C are used to drive movement of corresponding seal plates 106A-C along the longitudinal axis 114 between a closed position (FIG. 10) and open positions (FIG. 13). When in the closed position, the seal plate 106A seals an array of orifices 116A of the orifice plate 108, the seal plate 106B seals an array of orifices 116B of the orifice plate 108, and the seal plate 106C seals an array of orifices 116C of the orifice plate 108, as shown in FIG. 10.

Each of the seal plates 106A-C may be individually actuated from the closed position (FIG. 10) to the open position to provide a different flow rate of the fluid through the conduit 102. In some embodiments, each of the arrays of orifices 116A-116C form an equivalent single orifice of the same diameter. In some embodiments, the arrays of orifices 116A, 116B, and 116C form equivalent single orifices of different diameters. In some embodiments, the equivalent areas of the arrays of orifices 116A-C increase in a binary sequence. For example, one of the seal plates 106 may cover a single orifice 116 of the orifice plate 108, another seal plate 106 covers two orifices 116 of the orifice plate 108, another seal plate 106 covers four orifices 116, another seal plate 106 covers eight orifices 116, etc. In other embodiments, one of the seal plates 106 may cover 44 orifices 116, another seal plate 106 covers 88 (2X44) orifices 116, another seal plate 106 covers 176 (4X44) orifices 116, another seal plate 106 covers 352 (8X44) orifices 116, etc. Proportional flow of fluid through the conduit 102 and the valve 200 can be achieved by fully opening a specified number of the orifices 116 of the orifice plate 108 by selectively actuating the seal plates 106 to their fully open states using the corresponding piezostack actuators 104.

Thus, in operation, a single seal plate 106, such as seal plate 106A, may be actuated using the piezostack 104A to move the seal plate to its open state to provide a corresponding flow rate of fluid through the conduit 102, as shown in FIG. 11. A higher flow rate may be achieved by further actuating seal plate 106C to its fully open state using the corresponding piezostack 104C, as shown in FIG. 12. Yet a further increase in the flow rate of the fluid through the conduit 102 may be achieved by actuating the seal plate 106B to the open state using the corresponding piezostack 104B, as shown in FIG. 13.

The valve 200 may be organized substantially as described above with the valve 100, as shown in FIG. 14. In some embodiments, the seal plate carrier 118 includes separately moveable segments, generally referred to as 140, to allow for the individualized actuation of the corresponding seal plate 106. For example, the piezostack 104A is configured to drive movement of segment 140A, which drives movement of the corresponding seal plate segment 106A along the axis 114 toward or away from the array of orifices 116A (FIG. 10) of the orifice plate 108 to either seal the corresponding array of orifices 116A or open flow through the array of orifices 116A. Likewise, a piezostack 104B drives movement of the segment 140B, which in turn drives movement of the corresponding seal plate 106B along the longitudinal axis 114 to either seal the corresponding array of orifices 116B (FIG. 10) of the orifice plate 108 or open flow through the array of orifices 116B of the orifice plate 108. The piezostack 104C is configured to drive movement of segment 140C, which drives movement of the corresponding seal plate 106C along the axis 114 toward or away from the array of orifices 116C (FIG. 10) of the orifice plate 108 to either seal the corresponding array of orifices 116C or open flow through the array of orifices 116C. A piezostack 104D is configured to drive movement of a corresponding segment 140D, which drives movement of the corresponding seal plate 106D along the axis 114 toward or away from the corresponding array of orifices 116 of the orifice plate 108 to either seal the corresponding array of orifices 116 or open flow through the corresponding array of orifices 116.

In some embodiments, each of the piezostacks 104 of the valve 200 contracts when a voltage is applied to it. In these embodiments, each piezostack seals the corresponding orifices 116 when unpowered, and contracts when in a powered state to unseal the corresponding orifices 116. In some embodiments, each of the piezostacks 104 elongates when a voltage is applied to it. In these embodiments, each piezostack opens the corresponding orifices when in an unpowered state, thereby unsealing the corresponding orifices 116, and elongates or expands when in a powered state to seal the corresponding orifices 116. In some embodiments, each piezostack 104 of the valve 200 is supported in a similar manner as described above with reference to FIG. 8, thereby reversing the opening and closing functions described previously.

FIG. 15 is a simplified view of a portion of an orifice plate 108 in accordance with additional embodiments of the present disclosure, in which the orifices 116 are in the form of one or more annular rings, annular segments, annular arcs or linear slots, generally referred to as slots 142, that are angularly displaced from each other about the central axis of the orifice plate 108. In some embodiments, the slots 142 are micro-machined through the orifice plate 108. In some embodiments, a width of the annular ring or slots 142 is sized at approximately twice the expected displacement of the piezostack 104. The basis of this sizing is that the flow area around both the inner periphery and the outer periphery of annular ring 142 times the displacement of the end 115 of piezostack 104 will match the area of the annular orifice 142 when the sealing face of seal plate 106 is displaced 50% of the width of the annular ring 142 from the sealing face of orifice plate 108 when the width of annular ring 142 is small compared to its diameter.

In some embodiments, the slots 142 are annular segments or arcs, as shown in FIG. 15. In some embodiments, each end of the slots 42 includes a stress relief hole 144 to reduce stress concentration. In some embodiments, the slots 142 are separated from each other by structural ribs of the plate 108 that extend between the slots 142, such as between the stress relief holes 144, for example. In some embodiments, the slots 142 are uniformly distributed around the central axis of the plate 108. Thus, in some embodiments, the orifice plate 108 includes the same arrangement of slots 142 as the exemplary slots 142 shown in the full quadrant of the plate 108 shown in FIG. 15.

Exemplary dimensions are also shown in FIG. 15 for slots 142 having an opening area that is equivalent to a single orifice having a diameter of 1.25 mm, with the piezostack having a displacement of approximately 15 μm. In some embodiments, the slots 142 have a width of approximately 30 μm.

Alternative shapes can be used in place of the annular ring or arc segments shown in FIG. 15. For example, eight linear slots each having a width of 30 microns could be arranged in an octagonal pattern to approximate a circular annulus.

Additional embodiments of the valve 100 include features that stabilize the transition of the seal plate 106 from the open position (FIG. 2) to the closed position (FIG. 1), and reduce the likelihood of a seal failure between the sealing face 132 of the seal plate 106 and the orifice plate 108 when the seal plate 106 is in the closed position.

FIG. 16 is a simplified side cross-sectional view of a portion of the valve 100 illustrating an exaggerated example of the seal plate 106 failing to seal the orifices 116 of the orifice plate 108 when in the closed position due to a non-parallel relationship between the sealing face 132 of the seal plate 106 and the orifice plate 108. Specifically, the seal plate 106 or the sealing face 132 is at an angle 190 relative to the orifice plate 108 or the surface 192 of the orifice plate, which is approximately perpendicular to the longitudinal axis 114. As a result, the sealing face 132 of the seal plate 106 engages the orifice plate 108 at one side 194, while the opposing side 196 is displaced from the orifice plate 108. The resulting gap between the sealing face 132 and the orifice plate 108 prevents the valve 100 from closing and allows fluid to leak through the orifices 116 of the orifice plate 108. This misorientation in the orifice plate 108 may occur, for example, due to a shift of the piezostack actuator 104 and/or the seal plate carrier 118 relative to the longitudinal axis 114, manufacturing errors, or other reasons.

FIGS. 17A-C respectively are simplified side cross-sectional views of a portion of an exemplary valve 100 that includes a suspension 200 that reduces the likelihood of misorientation between the seal plate 106 and the orifice plate 108 as the seal plate 106 is transitioned from the open position (FIG. 17A), to an intermediary position (FIG. 17B), and to the closed position (FIG. 17C), in accordance with embodiments of the present disclosure. In some embodiments, the suspension 200 is configured to flex and adjust the orientation of the sealing face 132 of the seal plate 106 relative to the orifice plate 108 in response to pressure applied by the seal plate carrier 118 (phantom lines) during movement of the seal plate 106 from the open position to the closed position, including during engagement between the sealing face 132 and the orifice plate 108. For example, FIG. 17A illustrates the seal plate 106 in the open position and the sealing face 132 being misoriented with the orifice plate 108 due to the non-parallel relationship between the seal plate 106 or sealing face 132 and the orifice plate 108 or the surface 192 of the orifice plate 108, as indicated by angle 190.

As the seal plate 106 is displaced by the piezostack actuator 104 toward the closed position, the side 194 of the sealing face 132 engages the orifice plate 108, while the opposing side 196 remains displaced from the orifice plate 108 due to the angle 190, as shown in FIG. 17B. As the piezostack actuator 104 continues to press the seal plate carrier 118 and the seal plate 106 toward the orifice plate 108, the suspension 200 flexes and allows the seal plate 106 to pivot and orient the sealing face 132 in the desired parallel relationship with the orifice plate 108 to the fully closed position, which seals the orifices 116, as shown in FIG. 17C.

Additionally, the suspension 200 may be configured to apply a continuous compressive force to the piezostack actuator 104. Thus, when the seal plate 106 is in the open position (FIG. 17A), the suspension 200 applies a compressive force to the piezostack actuator 104 through the seal plate carrier 118, for example. This assists in preventing the piezostack actuator 104 from being placed in tension or having a bending moment applied, which can damage the piezostack actuator 104.

An exemplary suspension 200 formed in accordance with embodiments of the present disclosure that drives parallelism between the sealing face 132 of the seal plate 106 and the surface 192 of the orifice plate 108 will be described with reference to FIGS. 18-23. FIGS. 18 and 19 respectively are a simplified isometric view of the valve 100, and a simplified cross-sectional view of the valve 100 shown in FIG. 18 taken generally along line 19-19. FIGS. 20 and 21 respectively are simplified isometric and top views of a suspension assembly 202 that includes the seal plate 106, the orifice plate 108 and the suspension 200, in accordance with embodiments of the present disclosure. FIG. 22 is a simplified isometric cross-sectional view of the suspension assembly 202 taken generally along line 22-22 of FIG. 21. FIG. 23 is a simplified side cross-sectional view of a portion of the suspension assembly 202, in accordance with embodiments of the present disclosure.

In some embodiments, the suspension 200 includes a plurality of flexure arms 204, such as flexure arms 204A-D, and a peripheral support 206, as best shown in FIGS. 20 and 21. Each flexure arm 204 includes a first end 208 that is attached to the seal plate 106, a second end 210 that is attached to the peripheral support 206, and an intermediary section 212 connecting the first and second ends 208 and 210. In some embodiments, the first and second ends 208 and 210 of each flexure arm 204 are angularly displaced from each other by an angle 214 about the longitudinal axis 114, as shown in FIG. 21. The angle 214 depends on the number of flexure arms 204. For example, for four flexure arms 204, the angle 214 may be approximately 25-80 degrees, for three flexure arms 204, the angle 214 may be approximately 25-110 degrees. The angles 214 for each of the flexure arms 204 may be the same or different from the other flexure arms 204.

In some embodiments, the angle 214 between the first and second ends 208 and 210 of the flexure arms 204 is greater than an angle 216 about the longitudinal axis 114 between the first and second ends 208 and 210 of adjoining flexure arms 204. For example, the angle 214 between the first and second ends 208 and 210 of the flexure arm 204A is greater than the angle 216 between the first end 208 of the flexure arm 204A and the second end 210 of the flexure arm 204D, as shown in FIG. 21. The angles 216 between the first and second ends 208 and 210 of adjoining flexure arms 204 may be approximately 5-20 degrees.

In some embodiments, the peripheral support 206 extends from the orifice plate 108 along the longitudinal axis 114, as shown in FIG. 23. The flexure arms 204 may be supported by the peripheral support 206 such that they are displaced from the orifice plate 108 along the longitudinal axis 114, as indicated in FIGS. 22 and 23. This configuration is likely best suited for when the valve 100 is configured to normally be open. As a result, there is a gap 218 between the flexure arms 204 and the orifice plate 108, as shown in FIG. 23.

Alternatively, the suspension 200 may be flipped such that the flexure arms 204 and the seal plate 106 lay flat against the orifice plate 108. This configuration is likely best suited for when the valve 100 is configured to normally be closed. In this configuration, the suspension 200 may be configured to bias the seal plate 106 against the orifice plate 108.

In some embodiments, the suspension 200 supports the seal plate 106 in the open position when the suspension 200 is in a quiescent state, as shown in FIG. 23. When in this open state, a gap 220 exists between the sealing face 132 and the surface 192 of the orifice plate 108, and a fluid flow may pass through the seal plate 106 and the orifices 116 of the orifice plate 108. In some embodiments, the gap 220 spans a distance of approximately 10-60 micrometers.

The suspension 200 and the suspension assembly 202 may be formed using any suitable technique. In some embodiments, the suspension 200 is integral with the seal plate 106 and is bonded to the surface 192 of the orifice plate 108. The integral suspension 200 and seal plate 106 may be formed using any suitable technique, such as microfabrication techniques. The peripheral support 206 may be bonded to the surface 192 of the orifice plate 108 using any suitable technique, such as silicon direct bonding, plasma enhanced silicon direct bonding, metallic bonding accomplished via eutectic bonding, or another suitable bonding technique. These bonding methods allow for high levels of control over alignment between the components and assist in ensuring a high level of parallelism between the sealing face 132 of the seal plate 106 and the surface 192 of the orifice plate 108.

Some embodiments of the seal plate carrier 118 operate to prevent or reduce misalignment between the sealing face 132 of the seal plate 106. FIGS. 24 and 25 respectively are an isometric view of an exemplary seal plate carrier 118 supporting the seal plate 106, and an isometric cross-sectional view of the valve 100 illustrating the seal plate carrier 118 of FIG. 24 in operation, in accordance with embodiments of the present disclosure. In general, the seal plate carrier 118 includes a body member 224 and a plurality of tab members 226 that extend radially from the body member 224 relative to the longitudinal axis 114, and may be evenly angularly distributed about the axis 114 around the body member 224. The tab members 226 are configured to engage and slide along (slidably engage) the interior wall 228 of the conduit 102 and promote centering of the seal plate carrier 118 and the seal plate 106 within the conduit 102 and in alignment with the longitudinal axis 114. The tabs 226 each include a side wall 230 that engages the interior wall 228 of the conduit, as shown in FIG. 25. In some embodiments, the side walls 230 conform to the interior wall 228 of the conduit 102. The tabs 226 limit the ability of the seal plate carrier 118 to pivot relative to the longitudinal axis 114 during actuation of the valve 100 between the open and closed positions. As a result, the tabs 126 assist in centering the seal plate carrier 118 and the seal plate 106 within the conduit 102 and in the desired alignment with the longitudinal axis 114.

Although the embodiments of the present disclosure have been described with reference to preferred embodiments, workers skilled in the art will recognize that changes may be made in form and detail without departing from the spirit and scope of the present disclosure. 

What is claimed is:
 1. A fluidic control valve configured to control a flow of fluid through a conduit comprising: a piezostack actuator; a seal plate including a sealing face; an orifice plate comprising a plurality of orifices; and a suspension connected to the seal plate; wherein: the piezostack actuator is configured to displace the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the orifice plate to open the valve; and the suspension is configured to flex and adjust an orientation of the sealing face relative to the orifice plate during movement of the seal plate from the open position to the closed position.
 2. The valve of claim 1, wherein the suspension includes a plurality of flexure arms and a peripheral support, each flexure arm including a first end attached to the seal plate and a second end attached to the peripheral support.
 3. The valve of claim 2, wherein the first and second ends of each flexure arm are angularly displaced from each other about the longitudinal axis.
 4. The valve of claim 3, wherein each flexure arm includes an intermediary section connecting the first and second ends and extending between the seal plate and the peripheral support.
 5. The valve of claim 4, wherein the first end of a first flexure arm of the plurality of flexure arms is angularly displaced about the longitudinal axis a greater amount from the second end of the first flexure arm than from the second end of a second flexure arm of the plurality of flexure arms.
 6. The valve of claim 4, wherein the second ends of the flex arms are displaced from the orifice plate along the longitudinal axis.
 7. The valve of claim 6, wherein the peripheral support extends from the orifice plate along the longitudinal axis.
 8. The valve according to claim 2, wherein the first and second ends of each of the flexure arms are angularly displaced from each other about the longitudinal axis from about 25-110 degrees.
 9. The valve according to claim 2, further comprising a support plate attached to the orifice plate and configured to stiffen the orifice plate and reduce deflection of the orifice plate in response to engagement with the seal plate, wherein the support plate has a thickness that is greater than 500 microns.
 10. The valve according to claim 8, wherein: the plurality of orifices includes greater than 20 orifices, each orifice having a diameter of about 10 microns to about 500 microns; and a circle having an area that is equivalent to a total area of the plurality of orifices has a diameter that is greater than four times a maximum distance the piezostack actuator displaces the seal plate from the orifice plate when in the open position.
 11. The valve according to claim 8, wherein each of the plurality of orifices includes a contoured cross-sectional profile taken in a plane that extends parallel to the longitudinal axis that tapers from at least one of the first and second surfaces.
 12. The valve according to claim 8, wherein: the seal plate includes a plurality of sealing bosses extending from the sealing face toward the orifice plate, each of the sealing bosses is positioned to overlay one of the orifices when the seal plate is in the closed position; or the orifice plate includes a plurality of sealing bosses extending from a surface of the orifice plate toward the sealing face of the seal plate, each of the sealing bosses surrounding one of the orifices.
 13. The valve according to claim 12, wherein the sealing bosses of the seal plate or the orifice plate include contoured cross-sectional profiles taken in a plane that extends parallel to the longitudinal axis, each defined by a curved exterior surface.
 14. The valve according to claim 2, wherein: the piezostack actuator is configured to displace the seal plate along the longitudinal axis multiple distances from the orifice plate in response to different voltages applied to the piezostack actuator; and each of the multiple distances corresponds to a different fluid flow rate through the valve.
 15. A fluidic control valve configured to control a flow of fluid through a conduit comprising: a piezostack actuator; a seal plate including a sealing face; a seal plate carrier between the piezostack actuator and the seal plate and configured to drive the seal plate along the longitudinal axis in response to expansion and contraction of the piezostack actuator; an orifice plate comprising first and second opposing surfaces, through which at least 20 orifices extend, each orifice having a diameter of about 10 microns to about 500 microns; and a suspension including a peripheral support and a plurality of flexure arms connecting the seal plate to the peripheral support; wherein: the piezostack actuator is configured to displace the seal plate carrier and the seal plate along a longitudinal axis of the conduit between a closed position, in which the sealing face engages the first surface of the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the first surface of the orifice plate to open the valve; and the suspension is configured to flex and adjust an orientation of the sealing face relative to the first surface of the orifice plate during movement of the seal plate from the open position to the closed position.
 16. The valve according to claim 15, wherein: the first and second ends of each flexure arm are angularly displaced from each other about the longitudinal axis; and the second ends of the flex arms are displaced from the orifice plate along the longitudinal axis.
 17. The valve according to claim 16, wherein each flexure arm includes an intermediary section connecting the first and second ends and extending between the seal plate and the peripheral support.
 18. The valve according to claim 17, wherein the first end of a first flexure arm of the plurality of flexure arms is angularly displaced about the longitudinal axis a greater amount from the second end of the first flexure arm than from the second end of a second flexure arm of the plurality of flexure arms.
 19. A fluidic control valve configured to control a flow of fluid through a conduit comprising: a piezostack actuator; a seal plate including a sealing face; an orifice plate comprising a plurality of orifices; and a seal plate carrier between the piezostack actuator and the seal plate and configured to slidably engage the conduit and center the seal plate with a longitudinal axis of the conduit; wherein the piezostack actuator is configured to displace the seal plate along the longitudinal axis of the conduit between a closed position, in which the sealing face engages the orifice plate, seals the orifices of the orifice plate and closes the valve, and an open position, in which the seal plate is displaced from the orifice plate to open the valve.
 20. The valve according to claim 19, wherein the seal plate carrier includes a body member and plurality of tab members extending radially from the body member relative to the longitudinal axis that slidably engage an interior wall of the conduit. 